LED Precision exposure machine is a set of electro-optical, mechanical, vacuum and other integration of meta-precision photolithography equipment, under the control of the computer, the use of focused electron beam line light to the substrate coated with photoresist exposure, photoresist irradiated by the physicochemical properties of the physical and chemical properties of the change in the solvent to form a good solvents or non-good solvents in the region, so as to form a fine graphic in the etching on.